The DM8000 from Leica is a modern microscope for the semiconductor industry. The integrated LED light source emits very little heat and has no bulky lamp housing, making it ideal for small spaces.
We also have the option of retrofitting a laser autofocus and combining this with the automatic Z-drive. In combination with a piezo stage, a small height variation can be compensated for across the entire wafer at very high speed. This is particularly helpful for high-speed defect scans.
With our own production we can offer various chucks for wafers and masks with high flexibility in the design to meet our customers’ specific requirements.
All of this, in combination with software features such as golden template matching or deep learning, turns the microscope into a high-performance laboratory or production microscope.
The microscope DM8000 is suitable for almost all of our classic applications. From metrology tasks such as CD or overlay measurements to complex inspections in combination with golden template matching or deep learning, a wide variety of tasks can be carried out with the DM8000.
We have integrated a laser into the DM8000, and we are able to combine this with the Z-drive to create a laser autofocus system. This makes the DM8000 an excellent alternative to the INM200. In combination with a piezo stage, it is possible to use laser autofocus to make a minimal but very quick change in the Z position. With this combination, we create perfect conditions for on-the-fly inspections.
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