Experience a new benchmark in automated wafer qualification with our next-generation Promis 300 EFEM platform. At its core, a high-throughput dual-arm robot provides seamless and efficient handling of both 200mm and 300mm wafers, accommodating various cassette types like FOUPs and FOSBs within a single, flexible system. We ensure complete process integrity with integrated DMC and OCR readers for reliable wafer identification and full traceability.

The core strength of our system is its modular construction. Configure and adapt the microscope precisely to your specific tasks, ensuring you only invest in the capabilities you need.

With our advanced automatic filter station and mirror switch, you can effortlessly switch between various illumination and contrast methods. This provides optimal flexibility for everything from brightfield to advanced fluorescence imaging.

The innovative multi-camera tube allows for the integration of different cameras in one system. Capture images across various spectral ranges, from VIS to NIR, empowering you to see your sample in entirely new ways.

The INM200 Microscope serves as the robust core of your analytical setup. This highly adaptable system is designed to combine multiple applications on a single platform, saving space and increasing efficiency. With our MCS-Software and various modules we integrated essential metrology functions like CD/Overlay and film thickness measurements or sophisticated inspection capabilities, enhanced by powerful AOI and Deep Learning algorithms. Whatever your application, the INM200 provides the precision optics and modular flexibility you need to get the results you can trust.