A new development in collaboration with our partners. This is the first time we are able to use a cross table with a possible travel path of 500mm.
This allows very large samples to be inspected or measured. This system is ideal for inspection or review tasks.
But we can expand the system, for example for thin film measurement or other customer challenges.
This stage is for extra large samples of wafers or masks.
Thanks to our own production, we are able to provide chucks, mask holders or other sample holders.
With a special damper system, we are able to compensate for the tilting of the cross table.
Thanks to the standardized modular design of the microscope, we are also able to provide a variety of applications.
This system is ideal for inspection or review tasks. A thickness measurement system can also be added.
We are able to expand the microscope with our automatic filter system.
Do you have a metrology or inspection task that requires such a microscope? Contact us and we will look for solutions with you.
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